A Review of CMOS-MEMS Thermal flow Sensor

Research Article
Open access

A Review of CMOS-MEMS Thermal flow Sensor

Ang Li 1 , Haonan Zhao 2* , Yufei Zhou 3 , Zhenjia Liu 4
  • 1 Beijing Institute of Technology, Beijing, China    
  • 2 Beijing Institute of Technology, Beijing, China    
  • 3 Xi’an Jiaotong-Liverpool University, Suzhou, China    
  • 4 Beijing Institute of Technology, Beijing, China    
  • *corresponding author 1736392599@qq.com
Published on 20 June 2025 | https://doi.org/10.54254/2755-2721/2025.24253
ACE Vol.168
ISSN (Print): 2755-273X
ISSN (Online): 2755-2721
ISBN (Print): 978-1-80590-205-8
ISBN (Online): 978-1-80590-206-5

Abstract

In Micro-Electro-Mechanical Systems (MEMS) thermal flow sensors, CMOS integration plays a crucial role, especially in enhancing the performance of MEMS thermal flow sensors. This paper reviews the basic principle of CMOS-MEMS thermal flow sensor, introducing three prevalent types. The impact of CMOS integration on sensor performance is introduced, with their advantages highlighted: high integration, low cost, and low energy consumption. Their limitations are also addressed, including Limited material choice, inaccuracy due to heat loss, increased processing complexity and high cost, alongside proposed solutions to enhance their performance. The paper focuses on three basic application sectors of CMOS-MEMS thermal flow sensors. Finally, he potential for multi-module integration and extreme temperature resilience is discussed, indicating a promising trajectory for future advancements in this field.

Keywords:

CMOS-MEMS, thermal flow sensor, integration, cost, energy consumption

Li,A.;Zhao,H.;Zhou,Y.;Liu,Z. (2025). A Review of CMOS-MEMS Thermal flow Sensor. Applied and Computational Engineering,168,87-98.
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References

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Cite this article

Li,A.;Zhao,H.;Zhou,Y.;Liu,Z. (2025). A Review of CMOS-MEMS Thermal flow Sensor. Applied and Computational Engineering,168,87-98.

Data availability

The datasets used and/or analyzed during the current study will be available from the authors upon reasonable request.

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Volume title: Proceedings of the 5th International Conference on Materials Chemistry and Environmental Engineering

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Volume number: Vol.168
ISSN：2755-2721(Print) / 2755-273X(Online)

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References

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[17]. W. Xu, B. Wang, M. Duan, M. Ahmed, "A three-dimensional integrated micro calorimetric flow sensor in CMOS MEMS technology," IEEE Sensors Letters, vol. 3, no. 2, pp. 1-4, Feb. 2019.

[18]. A. De Luca, F. Udrea, "CMOS MEMS hot-film thermoelectronic flow sensor," IEEE Sensors Journal, vol. 17, no. 15, pp. 4800-4809, Aug. 2017.

[19]. W. Xu, X. Wang, X. Zhao, Y. K. Lee, "Two-dimensional CMOS MEMS thermal flow sensor with high sensitivity and improved accuracy," IEEE Sensors Journal, vol. 20, no. 1, pp. 380-388, Jan. 2020.

[20]. W. Xu, X. Wang, R. Wang, J. Xu, "CMOS MEMS thermal flow sensor with enhanced sensitivity for heating, ventilation, and air conditioning application," IEEE Transactions on Industrial Electronics, vol. 68, no. 5, pp. 4468-4476, May 2021.

[21]. W. Xu, X. Wang, Z. Ke and Y. -K. Lee, "Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity," in IEEE Transactions on Industrial Electronics, vol. 69, no. 3, pp. 3183-3192, March 2022.

[22]. Izhar, W. Xu, L. -J. Yang and Y. -K. Lee, "CMOS Compatible MEMS Air Velocity Sensor With Improved Sensitivity and Linearity for Human Thermal Comfort Sensing Applications," in IEEE Sensors Journal, vol. 21, no. 21, pp. 23872-23879, Nov. 2021.

[23]. Z. H. A. Rahman, M. H. M. Khir and Z. A. Burhanudin, "CMOS-MEMS thermoelectric generator for low power medical devices," 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), Kuala Terengganu, Malaysia, 2015, pp. 1-4.

[24]. A. A. S. Rabih, J. O. Dennis, M. H. Md Khir and M. A. Abdullah, "Design, modeling and simulation of CMOS-MEMS resonator for biomedical application," 2014 5th International Conference on Intelligent and Advanced Systems (ICIAS), Kuala Lumpur, Malaysia, 2014, pp. 1-6.

[25]. Mirza, A. et al., "Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications," RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics, Daerah Langkawi, Malaysia, 2013, pp. 70-73.

[26]. Mirza, A. et al., "Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications," RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics, Daerah Langkawi, Malaysia, 2013, pp. 70-73.

[27]. L.-J. Yang, R. Waikhom, H.-Y. Shih, and Y.-K. Lee, "Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor," Processes, vol. 10, no. 7, Art. no. 1280, pp. 1-15, June 2022.

[28]. H. Baltes, O. Brand, J. G. Korvink, R. Lenggenhager, and O. Paul, “IMEMS - Integrated Micro Electro Mechanical Systems by VLSI and Micromachining.”

[29]. S. Ghosh and M. Bayoumi, “On Integrated CMOS-MEMS System-on-Chip,” in The 3rd International IEEE-NEWCAS Conference, Quebec City, Canada, 2005, pp. 276–279.

[30]. A. Vasanthara and K. Krishnamoorthy, “Tire Pressure Monitoring System Using SoC and Low Power Design,” Circuits Syst., vol. 07, no. 13, pp. 4085–4097, 2016.

[31]. C. Zuo and G. Piazza, “Single-ended-to-differential and differential-to-differential channel-select filters based on piezoelectric AlN contour-mode MEMS resonators,” in 2010 IEEE International Frequency Control Symposium, Newport Beach, CA, USA: IEEE, Jun. 2010, pp. 5–8.

[32]. Chang, C.; Tsai, M.; Liu, Y.; Sun, C.; Fang, W. Development of multi-axes CMOS-MEMS resonant magnetic sensor using lorentz and electromagnetic forces. In Proceedings of the International Conference on Micro Electro Mechanical Systems, Taiwan, China, 20–24 January 2013; pp. 193–196.

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